Product Description

Mass flow controller (MFC) accurately measures and controls mass flow rates, which is widely applied in the fields as: semiconductor and IC fabrication, special materials science, chemical industry, petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching, etc.. The typical applications include: microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma etching, sputtering, ion implantation, vacuum deposition equipment, optical fiber melting, micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments.

The SZS100 MFC/MFM are a latest generation MFC for use in semiconductor

applications and demanding industrial uses where its high accuracy and flexibility in interfacing are required.

The SZS100 MFC/MFM incorporate a dual interface, voltage and current as well as RS-485 digital interfaces. It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring. SZS100 series have wide range of power supply(available for ±8 ~ ±16 VDC or +14 ~ +28 VDC).

In addition, auto Alarm, change of operating gas and range available through the digital interface. Customer Secondary Development of control and sample software is available through the open protocol.

SZS100 MFC default setting:

MAC address:32;

RS485 baud rate:19200;

Control mold: 0-5V analog signal control.

Application

semiconductor and IC fabrication, special materials science, chemical industry, petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching, etc.. The typical applications include: microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma etching, sputtering, ion implantation, vacuum deposition equipment, optical fiber melting, micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments.

Technical Parameters

Notes :

MFC/MFM is calibrated by N2 as a standard gas.

Units:                            SCCM  (Standard Cubic Centimeter/Min);

                                     SLM    (Standard Liter/Min)

Standard Situation:      Tem - 273.15K ( 0 ºC );

Air Pressure -              101325 Pa  (760mm Hg)

F.S :                             Full Scale

Calibration Features

Normally, the MFC are calibrated close to customer's requirement ( the requirement

should be accorded with the specification). Without customer's information, the MFC are calibrated under standard conditions.

Standard conditions

Without special conditions specified by the customer, the MFC is calibrated under the following standard conditions:

Pressure Outlet: Atmospheric.

Normally gas mass flow rate is transferred to gas volume flow rate at standard state.

Mass flow rate unit:

SCCM---standard cubic centimeter per minute.

SLM-------standard liter per minute.

Standard state:Temperature - 0ºC (273.15K)

Pressure - 101325Pa (760mmHg)

At standard state, the gas density will be constant. The multiplication of density and

volume flow rate is equal to the mass flow rate. Therefore at the standard state, the volume flow rate can represent mass flow rate.

The standard mounting position is horizontal, And other positions such as vertical(inlet up or down), flatwise or customized position are optional. The mounting position should be specified by the customer to ensure the best accuracy.

Manufacturing Environment

The MFC are assembled in a class 100 clean room, calibrated, packaged and controlled in class 1000 environment. The temperature is 22±2ºC.

Precision Adjustment

Each MFC is accurately controlled for 24 hours after manufacturing on a different calibration bench. The accuracy, the dynamic response, the stability to pressure variations is double checked, only qualified product available for sale.

The Notice of Safety

Please pay attention to the below notices when reading this manual. We are not responsible for any result without abiding by the below notices.

a) Do not replace any components or disassemble instrument.

Do not replace any components, or disassemble the instrument without any authorized and make sure that the label or/and seal of product is not removed when returning for reworking, recalibration and maintenance.

b) Please contact professional for technical service.

Do not replace any components. Any technical support is provided by professional who must be authorized by Sevenstar.

c) Please pay more attention to use dangerous gas.

Instrument should be purged completely and keep safety if dangerous gas is used. Meanwhile make sure that moist gas must not react with material of seal and instrument.

d) Please pay attention to purging instrument.

The whole system should be purged by dry gas after and before the instrument is

installed.

e) Please abide by proper steps of purging.

Product should be purged and handled with gloves.

f) Do not use the instrument in explosive environment.

Do not use the instrument in explosive environment, unless the safety certificate is available.

g) Please use proper fittings and keep the rules.

All fittings of instrument must be matched according to the listing in manual. Please

read manual carefully before screwing tightly.

h) Please do leakage check.

Please check carefully all of vacuum parts and make sure that there is not leakage in the system.

i) Please make sure that instrument is working under safe pressure.

Please make sure that the pressure of inlet gas is less than maximum working pressure (referring to maximum working pressure in manual).

j) Please keep the whole system away from pollution.

When system running, do not use polluting gas, such as particle of dust, dirt, fibre, glass or scrap iron.

k) Please do warm-up instrument before working.

Please do warm-up instrument, especially in using dangerous gas. Please close valve completely to make sure that there is not error flow.

 

 

 

 

 

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